To study the underlying physical principles, methods of fabrication and applications of a broad range of micro-scale devices that combine mechanical, electrical/electronic and optical functionalities.

By the end of the module you will be able to:
* Explain the operational principles of a range of micro-scale devices;
* Calculate key performance parameters for a range of micro-scale devices given information about their construction and dimensions;
* Suggest possible fabrication schemes for devices given information about their construction and dimensions;
* Carry out design calculations to determine key device parameters (e.g. dimensions) given the device layout and performance requiremenets;
* Deduce the scaling behaviour of specific device characteristics starting from basic scaling laws.

Introduction: micro- and nano-scale size domains; scaling of physical laws; MEMS materials and processes; MEMS devices and applications;
Micromechanics: plane statics; Euler beam theory and application to beams and membranes; MEMS suspension design; MEMS resonators; damping;
Fabrication Technologies: semiconductor materials; photolithography; direct-write methods (e-beam, FIB, scanning probe); doping; thin film growth and deposition; metallisation; wet and dry etching; silicon micromachining; metal MEMS processes;
MEMS Sensors: physical sensors e.g. pressure, acceleration, strain, flow; chemical sensors;
MEMS Actuators: microactuators based on various principles e.g. electrothermal, electrostatic, electromagnetic, piezoelectric and SMA; actuator applications e.g. inkjet, electrical and optical switching;
Microfluidics: scaling laws for microfluidics; transport in micro-channels; microfluidic components e.g. filters, mixers/reactors, valves/controllers, pumps;